Cleanroom Deficiencies Correction

Northern Illinois University

DeKalb, Illinois


Provide engineering services to modify HVAC, electrical, plumbing, and fire protection systems in order to correct operational and life safety deficiencies as well as construct a new fully functional ISO Class5 (Federal Standard Class 100) microelectronics clean research facility.  The building modifications include the upgrading of the existing deionized water system so that it can serve the existing cleanroom suites and the new cleanroom addition with 15Megohm D.I. water throughout and 18Megohm D.I. water at some point of use locations, the installation of a chemically treated new chilled water loop for the cooling of the existing and new cleanroom process equipment.  The new additions’ systems include a new customized air handling system, a specialty gas monitoring system, emergency exhaust air system, and specialty gas distribution system which includes Hydrogen, Silane, DiChloroSilane, Ammonia, Nitrogen, and Phosphine. 

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